UNIVERSAL WAFER HANDLER
II
DUAL-CASSETTE WAFER MAPPING AND SORTING SYSTEM
• Unique 50 wafer lot
capability
• Ideal for lot mapping, identification,
sorting or transfer
• Smallest footprint in the industry
• Fastest single wafer transfer system
on the market
|
• Handles up to 150 mm wafers • Remote keyboard and trackball • Graphical user interface • Sort programmable software for building custom sorting programs • Designed for CLASS I ultraclean environment • Optical Cassette Scanning for wafer presence and cross slot detection • Non-contact notch/flat finding and centering technology • CIP (cassette in place) indicators to detect proper cassette placement • Floppy disk drive input/output • Extra wafer slots for 50 wafer lot sorting |
System
FeaturesWAFER MAPPING & SORTING PRODUCTS:
Ultrasort 408 | Ultrasort 408 SC | APS 2XT | APS 2000 | APS 3000
SCS 2000 | SCS 3000 | Universal Wafer Handler II | MATSWAFER INSPECTION PRODUCTS:
Brightlight 200 | Ultrastation 150 | Ultrastation 150 XT
Ultrastation 200 | Ultrastation 200 XT
