ULTRASTATION 150 XT
For use with other microscopes
The
ultrastation family of products represent reliable, high throughput,
semiautomatic wafer inspection systems that provide safe, efficient
handling of wafers up to 200 mm. Quick, easy and safe operation provides
efficient handling of wafers for micro and macro inspection.
Designed for compatibility with virtually all microscopes and optics, the ultrastation line of products are highly flexible and cost effective.
Leveraging over twenty years of experience in the design, development and manufacture of wafer handling equipment for the semiconductor industry, Irvine Optical's Ultrastation family of products represent fundamental tools for automated wafer inspection.
System Features
• Class 1 clean room compatible
• High throughput — up to 900 wafers per hour
• Handles 4", 5" and 6" or 5" and 8" wafers using automation cassettes
• Stepper motor driven cassette elevator
• Smooth gliding linear crossroller XY stage
• Easy one button operation
• User defined inspection positions
• Vacuum touch end effector with vacuum sensing
• Slide-in computer board for easy access
WAFER MAPPING & SORTING PRODUCTS:
Ultrasort 408 | Ultrasort 408 SC | APS 2XT | APS 2000 | APS 3000
SCS 2000 | SCS 3000 | Universal Wafer Handler II | MATSWAFER INSPECTION PRODUCTS:
Brightlight 200 | Ultrastation 150 | Ultrastation 150 XT
Ultrastation 200 | Ultrastation 200 XT
