The ULTRASORT 408 is a reliable, high throughput robotic four-cassette sorting system that provides safe, efficient handling of wafers up to 200 mm.

Representing the culmination of over twenty years of experience in the design, development and manufacture of water inspection, handling and sorting equipment for the semiconductor industry, Irvine Optical's Ultrasort 408 is a fundamental tool for today's wafer fabrication process.

System Features

• Small footprint — 36" x 28"

• Class 1 clean room compatible

• GUI-driven touchscreen display

• High throughput — up to 800 wafers per hour

• Flexible — handles 125, 150, or 200 mm diameter wafers

• CIP (cassette in place) indicators to detect proper cassette placement and correct wafer size selection

• Optical cassette scanning for wafer presence and cross-slot detection

• IOC wafer edge detection for safe handling

• Non-contact notch/flat finding and centering technology

• Floppy disk drive input/output

• Dual OCR read stations maximize wafer throughput

• Custom sort programmability software