The SCS 3000 is a reliable, high throughput "self contained" SMIF sorting system that provides safe and efficient wafer handling of wafers up to 200 mm.

Three ultra-fast IOC SMIF indexers provide ultimate flexibility and reliability. Irvine Optical has been manufacturing cassette elevators (indexers) since developing its first automated wafer handling system in 1982.

Software and hardware are designed for compatibility with the wide range of cassettes, SMIF PODs, and Lot ID systems used in today's SMIF fabrication plants.

The SCS 3000 represents the culmination of over 20 years of experience in the design, development and manufacture of wafer handling and sorting equipment for the semiconductor industry.

Load Station µEnvironment™ — Ultra-clean, ULPA filtered air is distributed horizontally across the wafer cassettes via pressurized plenums with GORE-TEX® diffusion membranes. To meet Class M1 cleanliness goals, the indexer areas are over-pressurized with respect to the external environment and the rest of the internal environment, preventing particles from the robotics system from being swept onto the wafers.

Instrument Minienvironment — A Class M1 certified minienvironment integrated with the wafer sorting section of the tool provides clean air and over-pressurization in the robotic handling areas. The fan/filter unit contains a variable speed controller (with sensor) for compensation of changing pressure conditions.

System Features

• Sub-class 1 clean room compatible

• High throughput

• Ergonomic loading plane

• Flexible — handles 150 mm or 200 mm wafers and Empak/Jenoptik, Fluoroware™ and Asyst SMIF PODs

• Sort programmability software for building custom sorting routines

• GUI-driven touchscreen display

• Optical cassette scanning for wafer presence and cross-slot detection

• IOC wafer edge detection for safe wafer placement

• 26 slot upgrade capability

• Floppy disk drive input/output

• Maintenance in a drawer — easy slide out side access to PCBs and cables

• UPS/vacuum reservoir system