The APS 3000 is a reliable, high throughput Automated Programmable Sorting system that provides safe handling of wafers up to 200 mm.

Representing over twenty years of experience in the design, development and manufacture of wafer inspection, handling and sorting equipment for the semiconductor industry, Irvine Optical's APS 3000 is an essential tool for today's wafer fabrication process.

System Features

• Small footprint — 36" x 32" (with keyboard in front position)

• Class 1 clean room compatible

• Ergonomic — tilting elevators (SEMI standard)

• GUI-driven touchscreen display

• Non-contact notch/flat find and centering technology

• High throughput — up to 1100 wafers per hour

• Flexible — handles 150 or 200 mm diameter wafers

• CIP (cassette in place) indicators detect proper cassette placement and correct wafer size selection

• IOC wafer edge detection for safe handling

• Optical cassette scanning for wafer presence and cross-slot detection

• Floppy disk drive and CD-ROM input/output

• Accessible front panel maintenance

• Wafer protrusion detection

• Vacuum reservoir

• UPS (Un-interruptible Power Supply)

• Custom sort programmability software

• CE, S293, and S8-95 certified

• Pentium CPU

• Windows NT operating system