The APS 2000 is a reliable, high throughput Automated Programmable Sorting system that provides safe handling of wafers up to 200 mm.

Representing the culmination of over twenty years of experience in the design, development and manufacure of wafer inspection, handling and sorting equipment for the semiconductor industry, Irvine Optical's APS 2000 is an essential tool for today's wafer fabrication process.

System Features

• Small footprint — 24" X 31" (not including keyboard)

• Class 1 clean room compatible-integrated laminar flow across wafer transfer plane

• Ergonomic — tilting elevators (semi standard)

• GUI-driven touchscreen display

• High throughput — up to 700 wafers per hour

• Flexible — handles 125, 150, or 200 mm diameter wafers

• CIP (cassette in place) indicators to detect proper cassette placement and correct wafer size selection

• IOC wafer edge detection for safe handling

• Optical cassette scanning for wafer presence and cross-slot detection

• Floppy disk drive input/output

• Accesible front panel maintenence

• Custom sort programmability software